文献类型：期刊文献

中文题名：入射角和薄片表面特性对激光干涉测温的影响

英文题名：Influences of Incidence Angle and Surface Characteristic of Thin Slice on Laser Interference Thermometry

作者：石友彬[1];李慎德[1];王文华[1];陈春雷[1]

机构：[1]广东海洋大学理学院物理与光电科学系

年份：2007

卷号：36

期号：11

起止页码：2115

中文期刊名：光子学报

外文期刊名：Acta Photonica Sinica

收录：CSTPCD、、EI(收录号：20080111005541)、北大核心2004、Scopus(收录号：2-s2.0-37448999962)、CSCD2011_2012、北大核心、CSCD

基金：广东海洋大学引进人才启动基金(E05102/051202)资助

语种：中文

中文关键词：干涉测量;测温法;对比度;粗糙度;对比度禁区

外文关键词：Interferometry; Thermometry; Contrast ; Roughness ; Contrast forbidden-region

中文摘要：以激光干涉为理论基础,采用具有不同表面光学特性的单晶硅片和K-8光学玻璃为样品,针对不同的测量条件,研究干涉条纹对比度变化对温度测量的影响.分析了薄片干涉条纹对比度与测量光束直径、入射角、样品表面粗糙度以及表面镀膜之间的相互关系,研究了薄片的横向温度梯度对干涉对比度的影响.实验结果表明,上述各因素对温度测量参量对比度产生的影响具有规律性,并在一定对比度阈值条件下,能够满足精确测温的条件要求.

外文摘要：Based on laser interference theory, the mono-crystalline silicon slice with various surface optical characteristics and K-8 optical glass were studied. The contrast change of interference fringe impacting temperature measurement of these slices was researched. The contrast of interference fringe depended on measuring light beam, reference angle, surface roughness and surface coating film was analyzed. The transverse temperature gradient of these slices impacting the contrast of interference fringe was discussed. The result indicated that the method for laser interferometry can fulfil the condition for measuring accurately temperature of the slice surface with non-ideal in the condition of some contrast threshold.