文献类型：期刊文献

中文题名：非本征型FP干涉光纤传感器的膜片性能研究

英文题名：Study on diaphragm performance of extrinsic FP interferometric optical fiber sensor

作者：林一城[1];王文华[1]

机构：[1]广东海洋大学电子与信息工程学院,广东湛江524088

年份：2023

卷号：42

期号：3

起止页码：73

中文期刊名：传感器与微系统

外文期刊名：Transducer and Microsystem Technologies

收录：CSTPCD、、CSCD_E2023_2024、北大核心、CSCD、北大核心2020

基金：广东省自然科学基金资助项目(2019A1515010835);广东省特色创新项目(2019KTSCX054);广东海洋大学博士启动基金资助项目(R19028)。

语种：中文

中文关键词：光纤传感器;法布里—珀罗干涉;膜片;灵敏度;频率响应

外文关键词：optical fiber sensor;Fabry-Perot(FP)interference;diaphragm;sensitivity;frequency response

中文摘要：针对膜片材料参数对膜片形变式非本征型法布里—珀罗(FP)干涉光纤传感器性能的影响,研究了石英玻璃和单晶硅(100)膜片非本征FP干涉光纤传感器,用于中低压环境的测量。选定膜片材料有效半径425~500μm,厚度10~30μm,通过MATLAB对不同材料的膜片进行仿真分析,研究了石英玻璃和单晶硅(100)膜片的主要参数有效半径、厚度对灵敏度与动态压力信号频率响应的影响。仿真结果表明:石英玻璃和单晶硅(100)都有比较适中的灵敏度和响应频率,在膜片有效半径和厚度相同的情况下,石英玻璃的灵敏度要高于单晶硅(100)的,而单晶硅(100)的频率响应高于石英玻璃。通过激光焊接石英玻璃膜片的FP干涉传感器,有效半径为500μm,厚度为30μm时,压力灵敏度的实测结果为5.77 nm/kPa,与仿真结果基本吻合。

外文摘要：Aiming at the influence of diaphragm material parameters on performance of diaphragm deformable extrinsic Fabry-Perot(FP)interferometric optical fiber sensor, extrinsic FP interferometric optical fiber sensor based on silica-glass and monocrystalline silicon(100)diaphragm is studied, which is employed for the measurement in the medium-pressure or the low-pressure environment.The effective radius and the thickness of selected diaphragm material is 425~500 μm and 10~30 μm, respectively.Simulated analysis of diaphragm with different materials are carried out by MATLAB,the influence of main parameters of silica-glass and monocrystalline silicon(100)diaphragms such as effective radius and thickness on sensitivity and frequency response of dynamic pressure signal is researched.The simulation results show that both silica-glass and monocrystalline silicon(100)have moderate sensitivity and response frequency.When the effective radius and thickness of the diaphragm are the same, the sensitivity of silica-glass is higher than that of monocrystalline silicon(100),and the frequency response of monocrystalline silicon(100)is higher than that of silica-glass.The FP interferometric sensor with silica-glass diaphragm welded by laser is employed with the effective radius of 500 μm and the thickness of 30 μm, the measured pressure sensitivity is 5.77 nm/kPa, which is in good agreement with the simulation results.