文献类型：期刊文献

英文题名：Study on speed and acceleration characteristics of 100 nm scale motion platform driven by linear servo motors

作者：Li, Guang Hui[1]; Wu, Peng[2]; Ni, Xiao Long[1]; Peng, Wen Fang[1]; Tan, Guang Yu[1]

机构：[1] Engineering College, Guangdong Ocean University, Zhanjiang, 524088, China; [2] Jiaxing Hualing Mechatronics Co., Ltd., Jiaxing, 314000, China

年份：2011

卷号：175

起止页码：357

外文期刊名：Solid State Phenomena

收录：EI(收录号：20160201792694)

语种：英文

外文关键词：Speed

外文摘要：A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system. ? (2011) Trans Tech Publications, Switzerland.