文献类型：期刊文献

英文题名：MICROSTRUCTURE AND BLUE PHOTOLUMINESCENCE OF HYDROGENATED SILICON CARBONITRIDE THIN FILMS

作者：Peng, Yinqiao[1];Zhou, Jicheng[2];Lei, Guibin[3];Gan, Yuanju[4];Chen, Yuefeng[4]

机构：[1]GuangDong Ocean Univ, Sch Elect & Informat Engn, Zhanjiang 524088, Peoples R China;[2]Cent S Univ, Sch Energy Sci & Engn, Changsha 410083, Hunan, Peoples R China;[3]GuangDong Ocean Univ, Guangdong Prov Key Lab Coastal Ocean Variat & Dis, Zhanjiang 524088, Peoples R China;[4]GuangDong Ocean Univ, Fac Math & Comp Sci, Zhanjiang 524088, Peoples R China

年份：2019

卷号：26

期号：4

外文期刊名：SURFACE REVIEW AND LETTERS

收录：SCI-EXPANDED(收录号：WOS:000468677300010)、、EI(收录号：20181304966173)、Scopus(收录号：2-s2.0-85044437464)、WOS

基金：The work was supported by the Science and Technology Project of Guangdong Province under contract (2016A010101028 and 2014A010103030) and the Program for Scientific Research Startup Funds of Guangdong Ocean University (No. E15046).

语种：英文

外文关键词：Silicon carbonitride; reactive sputtering; microstructure; annealing treatment; blue photoluminescence

外文摘要：Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning electron microscopy with energy dispersive spectrometer, atomic force microscope, Fourier transform infrared spectroscopy, X-ray diffraction and fluorescence spectrophotometer. No distinct crystal was formed in the SiCN:H films as-deposited and annealed at 600 degrees C and 800 degrees C. The SiCN:H films were mainly composed of Si-N, Si-C, Si-O, C-C, C-N,C N,N-H-n bonds and SiCxNy network structure. The strong blue photoluminescence observed from the SiCN:H film annealed at 600 degrees C was attributed to SiCxNy network structure.