文献类型：会议论文

英文题名：Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors

作者：Li, Guanghui[1];Wu, Peng[2];Ni, Xiaolong[1];Peng, Wenfang[1];Tan, Guangyu[1]

机构：[1]Guangdong Ocean Univ, Coll Engn, Zhanjiang 524088, Peoples R China;[2]Jiaxing Hualing Mechatron Co Ltd, Jian AH-314000, Jiangxi, Peoples R China

会议论文集：4th Conference on Application of Diamond and Related Materials in China (CADRM2010)/1st International Symposium on Advances in Brazed Superabrasive Tools (ISABS2010)

会议日期：AUG 19-23, 2010

会议地点：Xiamen, PEOPLES R CHINA

语种：英文

外文关键词：Linear motor; PMAC; Speed characteristics; Acceleration characteristics

外文摘要：A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.