文献类型：期刊文献

中文题名：Al／BaTiO_3／Si湿度传感器的电特性

英文题名：THE ELECTRICAL CHARACTERISTICS OF Al/BaTiO_3/Si HUMIDITY SENSORS

作者：吴英才[1]

机构：[1]湛江水产学院海渔系

年份：1995

卷号：15

期号：2

起止页码：65

中文期刊名：湛江水产学院学报

收录：CSTPCD

语种：中文

中文关键词：钛酸钡;俄歇电子能谱;固定电荷密度;湿度传感器

外文关键词：barium titanate;Auger electron spectra;fixed charge density ;respone timebreakdown voltage

中文摘要：用氩离子束镀膜法制备ＢａＴｉＯ３／Ｓｉ结构，并在４００～９００℃的温度下用氮气保护进行退火，用常规蒸铝技术制成Ａｌ／ＢａＴｉＯ３／Ｓｉ湿度传感器。用俄歇电子能谱分析ＢａＴｉＯ３膜的化学组分。采用高频电容—电压测试仪测定ＢａＴｉＯ３／Ｓｉ结构的固定电荷密度，分析固定电荷密度与退火的关系。结果表明：固定电荷密度达１０１１ｃｍ－２数量级。经９００℃、６０分钟退火后固定电荷密度下降至１９％到２０％。随着固定电荷密度的减少，湿度传感器的响应时间延长了６０％，而击穿电压提高了７倍。

外文摘要：With BaTiO3/Si structure deposited by argon ion beam sputtering equipment andannealed at 400-900℃ in nitrogen,the humidity sensors of Al/BaTiO3/Si are formed by vaporing aluminium in standard process.The chemical composition of BaTiO3 films are analysed by Auger electron spectra (AES).The fixed charge density in BaTiO3/Si structure istested with high frequencyC-V equipment. The density is as high as 1011'cm-2.Meanwhilethe studies of relations between fixed charge density and annealing are made.The resultsshow that the fixed charge density decreases to 19-20 percent after the structure is annealedat 900℃ in 60 minutes,and the response time of humidity sensors increases by 60 percent.But breakdown voltage goes up by 7 times.