文献类型：期刊文献

英文题名：Adaptive light intensity aided wavelength tuning for phase-shifting interferometric measurement system

作者：Lu, Qingjie[1];Wang, Ji[1];Liu, Wenjing[1];Liu, Chang[1]

机构：[1]Guangdong Ocean Univ, Sch Elect & Informat Engn, Zhanjiang 524088, Guangdong, Peoples R China

年份：2024

卷号：66

期号：6

外文期刊名：MICROWAVE AND OPTICAL TECHNOLOGY LETTERS

收录：SCI-EXPANDED(收录号：WOS:001246981500001)、、EI(收录号：20242516284485)、Scopus(收录号：2-s2.0-85196196391)、WOS

基金：This study was supported by Zhanjiang Ocean Youth Talent Innovation Plan (2023E0010), 2021 Guangdong Province Science and Technology Special Funds ("College Special Project + Task List") Competitive Distribution (2021A05237), Program for scientific research start-up funds of Guangdong Ocean University (R20065); PhD Research Startup Foundation of Guangdong Ocean University (060302112310, 060302112309).

语种：英文

外文关键词：phase-shifting interferometric; self-adaptive; wavelength tuning

外文摘要：In phase-shifting interferometric measurement system, using wavelength-tuned phase-shifting technology to measure optical surface can improve vibration errors. However, the wavelength-tuned phase-shifting interferometry is greatly challenged by nonlinear distortion between wavelength-tuned light intensity and voltage modulation, which has a certain impact on phase calculation accuracy. To address this issue, an adaptive light intensity-aided interferometric measurement scheme is proposed in this study. To improve the adjustment time of voltage response, an improved fuzzy single-neuron adaptive proportional differential integral constant amplitude control algorithm is built. By exploiting the online detection and feedback control of light intensity, the stable output of light intensity is integrated into phase-shifting measurement system. Experiment results verify that the improvement of light intensity fluctuation range, root mean square, and peak-to-valley measurement repeatability can be achieved with the proposed scheme.