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- MICROSTRUCTURE AND BLUE PHOTOLUMINESCENCE OF HYDROGENATED SILICON CARBONITRIDE THIN FILMS
- SURFACE REVIEW AND LETTERSPeng, Yinqiao Zhou, Jicheng Lei, Guibin Gan, Yuanju Chen, Yuefeng 出版年：2019
- Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning ...
